Ferroelectricity in hafnium oxide films doped with magnesium by chemical solution deposition

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作者：
Li, Ziqi [1 ]
Zhou, Dayu [1 ]
Wang, Jingjing [1 ]
Sun, Nana [1 ]
Zhang, Weiqi [1 ]
机构：
[1] Key Laboratory of Materials Modification by Laser, Ion, Electron Beams, Ministry of Education, School of Materials Science and Engineering, Dalian University of Technology, Dalian,116024, China
来源：
Journal of Applied Physics | 2022年 / 131卷 / 07期
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