Pneumatic servo bearing actuator with multiple bearing pads for ultraprecise positioning

被引：0
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作者：
School of Mechanical Engineering, Doshisha University, 1-3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan [1 ]
不详 [2 ]
不详 [3 ]
机构：
[1] Tsujimura, Shuhei
[2] Hashimoto, Yusuke
[3] Matsuoka, Takashi
[4] Hirayama, Tomoko
[5] Sasaki, Katsumi
来源：
| 1600年 / Fuji Technology Press卷 / 07期
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D O I：
10.20965/ijat.2013.p0498
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