Problem of producing an oxide on silicon

被引：0
|
作者：
Safarov, A.S. [1 ]
Shukurova, D.M. [1 ]
Ikramov, A.Kh. [1 ]
Arslanova, T.Zh. [1 ]
机构：
[1] Tashkentskij GTU im. A.R. Beruni, ul. Universitetskaya 2, Tashkent, 700095, Uzbekistan
来源：
Elektronnaya Obrabotka Materialov | 2003年 / 04期
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页码：84 / 86
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