High-linearity MEMS accelerometer with lateral comb finger groups

被引：0
|
作者：
Xiong, Xingguo [1 ]
Li, Huanyu [1 ]
机构：
[1] University of Bridgeport, Bridgeport,CT,06604, United States
来源：
Lecture Notes in Electrical Engineering | 2015年 / 312卷
关键词：
D O I：
10.1007/978-3-319-06764-3_76
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学科分类号：
摘要：
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页码：589 / 597
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