Deposition equipment of cubic boron nitride thin films

被引：0
|
作者：
Noma, Masao [1 ]
机构：
[1] Development Department, Shinko Seiki Co., Ltd., Moriyama-shi, Shiga 524, Japan
来源：
Journal of the Vacuum Society of Japan | 2008年 / 51卷 / 07期
关键词：
Boron nitride thin films - Coating methods - Coating system - Cutting properties - Deposition equipment - Low friction coefficients - Power supply frequency - Thin films - coatings;
D O I：
10.3131/jvsj2.51.499
中图分类号：
学科分类号：
摘要：
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页码：499 / 504
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