Anisotropic wet-chemical etching for preparation of freestanding films on Si substrates for atom probe tomography: A simple yet effective approach

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|

作者：

Tkadletz, Michael ^{[1
]}

Lechner, Alexandra ^{[2
]}

Pölzl, Silvia ^{[1
]}

Schalk, Nina ^{[1
]}

机构：

[1] Department of Materials Science, Montanuniversität Leoben, Franz Josef-Straße 18, Leoben,8700, Austria

[2] Materials Center Leoben Forschung GmbH, Roseggerstraße 12, Leoben,8700, Austria

来源：

Ultramicroscopy | 2021年 / 230卷

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