共 50 条
- [44] The Importance of Metrology in Medicine PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON MEDICAL AND BIOLOGICAL ENGINEERING, CMBEBIH 2019, 2020, 73 : 443 - 450
- [47] Metrology tool for fast measurement of patterned sapphire substrate used in LED manufacturing DIMENSIONAL OPTICAL METROLOGY AND INSPECTION FOR PRACTICAL APPLICATIONS III, 2014, 9110
- [48] Measurement and metrology Nuclear Instruments & Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1996, 369 (2-3):
- [49] Accuracy and Uncertainty in Noncontact Metrology MANUFACTURING ENGINEERING, 2010, 145 (05): : 67 - 74
- [50] Beyond measurement uncertainty: Improving the productivity of metrology tools through recipe error analysis METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXI, PTS 1-3, 2007, 6518