Annealing characteristics of Zn-doped InN Films on sapphire substrates by reactive magnetron sputtering

被引:0
|
作者
机构
[1] Chen, Lung-Chien
[2] Chen, Hung-Chang
来源
Chen, L.-C. (ocean@ntut.edu.tw) | 1600年 / Japan Society of Applied Physics卷 / 44期
关键词
16;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [41] Microstructural Studies of Epitaxial ZnO Films Deposited on Sapphire by Reactive RF Magnetron Sputtering
    Singh, D.
    Kumar, R.
    Ganguli, T.
    Srinivasa, R. S.
    Major, S. S.
    SOLID STATE PHYSICS: PROCEEDINGS OF THE 55TH DAE SOLID STATE PHYSICS SYMPOSIUM 2010, PTS A AND B, 2011, 1349 : 793 - +
  • [42] Formaldehyde sensitive Zn-doped LPFO thin films obtained by rf sputtering
    Doroftei, Corneliu
    SENSORS AND ACTUATORS B-CHEMICAL, 2016, 231 : 793 - 799
  • [43] Epitaxial growth of aluminium-doped zinc oxide films by magnetron sputtering on (001), (110), and (012) oriented sapphire substrates
    P. Kuppusami
    G. Vollweiler
    D. Rafaja
    K. Ellmer
    Applied Physics A, 2005, 80 : 183 - 186
  • [44] Epitaxial growth of aluminium-doped zinc oxide films by magnetron sputtering on (001), (110), and (012) oriented sapphire substrates
    Kuppusami, P
    Vollweiler, G
    Rafaja, D
    Ellmer, K
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (01): : 183 - 186
  • [45] Well-aligned Zn-doped tilted InN nanorods grown on r-plane sapphire by MOCVD
    Zhang, Biao
    Song, Huaping
    Xu, Xiaoqing
    Liu, Jianming
    Wang, Jun
    Liu, Xianglin
    Yang, Shaoyan
    Zhu, Qinsheng
    Wang, Zhanguo
    NANOTECHNOLOGY, 2011, 22 (23)
  • [46] A comparative study of InN growth on quartz, silicon, C-sapphire and bulk GaN substrates by RF magnetron sputtering
    Umar Bashir
    Zainuriah Hassan
    Naser M. Ahmed
    Journal of Materials Science: Materials in Electronics, 2017, 28 : 9228 - 9236
  • [47] Reactive magnetron sputtering of TiOx films
    Baroch, P
    Musil, J
    Vlcek, J
    Nam, KH
    Han, JG
    SURFACE & COATINGS TECHNOLOGY, 2005, 193 (1-3): : 107 - 111
  • [48] PREPARATION OF PHOTOCATALYTIC THIN FILMS BY REACTIVE CO - MAGNETRON SPUTTERING OF Fe AND Zn
    Puodziunas, J.
    Dudonis, J.
    5TH INTERNATIONAL CONFERENCE RADIATION INTERACTION WITH MATERIALS: FUNDAMENTALS AND APPLICATIONS 2014, 2014, : 206 - 209
  • [49] The interplay of process parameters and influence on the AlN films on sapphire fabricated by DC magnetron sputtering and annealing
    Liu, Huan
    Guo, Wei
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2023, 38 (01)
  • [50] A comparative study of InN growth on quartz, silicon, C-sapphire and bulk GaN substrates by RF magnetron sputtering
    Bashir, Umar
    Hassan, Zainuriah
    Ahmed, Naser M.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2017, 28 (13) : 9228 - 9236