Nano-structures formation by ion beam bombardment on Si surfaces

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作者：
Key laboratory for Physical Electronics and Devices of Ministry of Education, School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an, China [1 ]
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Zhenkong Kexue yu Jishu Xuebao | / 3卷 / 354-357期
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Compilation and indexing terms; Copyright 2025 Elsevier Inc;
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摘要：
Nanostructures - Ion beams - Ion bombardment - Ions - Silicon wafers - Surface treatment - Atomic force microscopy - Sputtering
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