The measuring method and instrument development for the silicon ingot

被引：0
|
作者：
Guan, Shouping
Han, Gang
Shi, Qun
You, Fuqiang
机构：
[1] College of Information Science and Engineering, Northeastern University, Shenyang 110004, China
[2] Dandan North Crystal Instrument Co. Limited, Dandong 118400, China
来源：
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2008年 / 29卷 / SUPPL.期
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D O I：
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中图分类号：
学科分类号：
摘要：
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页码：461 / 464
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