BN and ZrN AES Spectra Obtained by Depth Profiling of ZrN/BN Multilayers

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机构：

[1] Sanz, J.M.

[2] Prieto, P.

[3] Quirós, C.

[4] Elizalde, E.

来源：

| 2000年 / AVS Science and Technology Society卷 / 07期

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10.1116/1.1288819

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