BN and ZrN AES Spectra Obtained by Depth Profiling of ZrN/BN Multilayers

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[1] Sanz, J.M.
[2] Prieto, P.
[3] Quirós, C.
[4] Elizalde, E.
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| 2000年 / AVS Science and Technology Society卷 / 07期
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10.1116/1.1288819
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