Similarity theory based method for MEMS dynamics analysis

被引：0
|
作者：
Li, Gui-Xian [1 ]
Peng, Yun-Feng [1 ]
Zhang, Xin [2 ]
机构：
[1] School of Mechanical and Electronic Engineering, Harbin Institute of Technology, Harbin 150001, China
[2] Dept. of Computer Science and Engineering, Arizona State University, AZ85287, United States
来源：
Journal of Harbin Institute of Technology (New Series) | 2008年 / 15卷 / 03期
关键词：
Equivalent circuits;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：312 / 316
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