Surface micromachined mirror based on pre-stress comb-drive actuator

被引：0
|
作者：
Wang, Weimin [1 ,2 ,3 ]
Yan, Shengmei [4 ]
Wang, Qiang [1 ,2 ]
Qiu, Chuankai [1 ]
Chen, Zexiang [2 ]
Fan, Bin [1 ]
机构：
[1] State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, Chengdu,610209, China
[2] School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu,610054, China
[3] University of Chinese Academy of Science, Beijing,100049, China
[4] Institute of Electronic Engineering, Chinese Academy of Engineering Physics, Mianyang,621900, China
来源：
Key Engineering Materials | 2015年 / 645卷
关键词：
D O I：
10.4028/www.scientific.net/KEM.645-646.1115
中图分类号：
学科分类号：
摘要：
12
引用
收藏
页码：1115 / 1119
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