Diffraction measurement of grating structure induced by irradiation of femtosecond laser pulse in acrylate block copolymers

被引:0
|
作者
Katayama, Shigeru [1 ,2 ,3 ,4 ]
Horiike, Mika [1 ,2 ,3 ]
Hirao, Kazuyuki [1 ,2 ,3 ]
Tsutsumi, Naoto [1 ,2 ,3 ]
机构
[1] Department of Polymer Science and Engineering, Kyoto Institute of Technology, Matsugasaki, Sakyo, Kyoto 606-8585, Japan
[2] Core Technology Center, Nitto Denko Corporation, 1-1-2 Shimohozumi, Ibaraki, Osaka 567-8680, Japan
[3] Division of Material Chemistry, Graduate School of Engineering, Kyoto University, Sakyo, Kyoto 606-8501, Japan
[4] Photon Craft Project, Japan Science and Technology Corporation, Keihanna Plaza Super-Lab.2-6, 1-7 Hikaridai, Seika-cho, Kyoto 619-0237, Japan
关键词
D O I
10.1143/jjap.41.2155
中图分类号
学科分类号
摘要
15
引用
收藏
页码:2155 / 2162
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