A high-sensitivity MEMS-based accelerometer

被引：1
|
作者：
Lainé, Jérôme [1 ]
Mougenot, Denis [1 ]
机构：
[1] Sercel, France
来源：
Leading Edge | 2014年 / 33卷 / 11期
关键词：
D O I：
10.1190/tle33111234.1
中图分类号：
学科分类号：
摘要：
引用
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页码：1234 / 1242
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