Subsurface deformation of germanium in ultra-precision cutting: characterization of micro-Raman spectroscopy

被引:0
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作者
Li, Zexiao [1 ]
Zhang, Xiaodong [1 ]
机构
[1] State Key Laboratory of Precision Measuring Technology and Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, Tianjin,300072, China
基金
中国国家自然科学基金;
关键词
Single crystals - Germanium - Residual stresses - Annealing - Crystal structure - Deformation - Phase transitions - Turning;
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页码:213 / 225
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