Investigation of diffusion barrier properties and thermal stability of ultrathin nano-crystal Zr-N films

被引：0
|
作者：
Ding, Ming-Hui [1 ]
Zhang, Li-Li [1 ]
Gai, Deng-Yu [1 ]
Wang, Ying [2 ]
机构：
[1] College of Material Science and Chemistry Engineering, Harbin Engineering University, Harbin 150001, China
[2] School of Electronics and Information Engineering, Harbin Engineering University, Harbin 150001, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 2008年 / 39卷 / 09期
关键词：
18;
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页码：1545 / 1548
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