Backside reflection error for ellipsometric measurement eliminated by spatial splitting beam method

被引：0

作者：

Zhou, Ming ^{[1
]}

Chen, Gang ^{[1
]}

Liu, Dingquan ^{[1
]}

机构：

[1] Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

来源：

Guangxue Xuebao/Acta Optica Sinica | 2013年 / 33卷 / 04期

关键词：

Back reflection - Backside grinding - Ellipsometric measurements - Incident angles - Oxide monolayer - Reflection errors - Sample surface - Spatial splitting;

D O I：

10.3788/AOS201333.0431001

中图分类号：

学科分类号：

摘要：

Spatial beam method is explored to eliminate the backside reflection in ellipsometric measurement. The main concept of this program is to focus the beam on the of sample surface, diverge on the bottom, and then the back reflection light will not reach the detector. The quartz glass and niobium oxide monolayer film are chosen as the experimental sample. Quartz glass samples are divided into 3 groups, which are measured directly, after backside grinding, and after the spatial splitting, respectively. For the untreated sample testing, the refractive index values at three incident angles are obviously different. In backside grinding case, the refractive index of the quartz glass appears consistent for three incident angles. After the spatial splitting, the refractive index of the quartz glass appears the same. The spatial splitting method is used for ellipsometric test of anti-niobium oxide monolayer, and good fitting of the experimental data is got.

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