Study on the uniformity of certain eccentricity surface chemical mechanical polishing of crystal

被引：0
|
作者：
Wang, Zhi-Bin [1 ,2 ]
Wu, Chuan-Chao [1 ]
An, Yong-Quan [1 ]
Zhao, Tong-Lin [1 ]
Xie, Kun-Yang [1 ]
Liu, Shun [1 ]
机构：
[1] Engineering Technology Research Center of Shanxi Province for Opto-Electronic Information and Instrument, Taiyuan, China
[2] Key Lab of Instrument Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2015年 / 44卷 / 03期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
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中图分类号：
学科分类号：
摘要：
Surface defects - Surface roughness - Laminating
引用
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页码：728 / 733
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