Development of a multilayer SiC surface micromachining process with capabilities and design rules comparable to conventional polysilicon surface micromachining

被引：0
|
作者：
Song, X. [1 ]
Rajgopal, S. [2 ]
Melzak, J.M. [2 ]
Zorman, C.A. [1 ]
Mehregany, M. [1 ]
机构：
[1] Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH 44106, United States
[2] FiberLead, Inc., Cleveland, OH 44121, United States
来源：
Materials Science Forum | 2002年 / 389-393卷 / 01期
关键词：
Micromolding process - Multilayer device fabrication - PolySiC;
D O I：
10.4028/www.scientific.net/msf.389-393.755
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：755 / 758
相关论文
共 50 条
  • [41] Design of a novel piezoelectric acoustic sensor using surface micromachining
    Yang, Yi
    Ren, Tian-Ling
    Liu, Li-Tian
    INTEGRATED FERROELECTRICS, 2006, 80 : 363 - 372
  • [42] Molding-based thin film patterning techniques for SiC surface micromachining
    Song, X.
    Guo, S.
    Zorman, C.A.
    Wu, C.H.
    Yasseen, A.A.
    Mehregany, M.
    Materials Science Forum, 2000, 338
  • [43] Development of surface micromachining techniques compatible with on-chip electronics
    French, PJ
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1996, 6 (02) : 197 - 211
  • [44] Character and mechanism of surface micromachining for C/SiC composites by ultrashort plus laser
    Wang, J.
    Liu, Y.
    Wang, C.
    Li, W.
    Yang, X.
    Zhang, Q.
    Cheng, L.
    Zhang, L.
    ADVANCES IN APPLIED CERAMICS, 2017, 116 (02) : 99 - 107
  • [45] Molding-based thin film patterning techniques for SiC surface micromachining
    Song, X
    Guo, S
    Zorman, CA
    Wu, CH
    Yasseen, AA
    Mehregany, M
    SILICON CARBIDE AND RELATED MATERIALS - 1999 PTS, 1 & 2, 2000, 338-3 : 1141 - 1144
  • [46] Piezoresistive pressure sensors fabricated by surface micromachining process compatible with CMOS process
    Yu, Huiyang
    Qin, Ming
    ELECTRONICS LETTERS, 2013, 49 (13) : 827 - 828
  • [47] A surface micromachining process for the development of a medium-infrared tuneable Fabry-Perot interferometer
    Calaza, C
    Fonseca, L
    Moreno, M
    Marco, S
    Cané, C
    Gracia, I
    SENSORS AND ACTUATORS A-PHYSICAL, 2004, 113 (01) : 39 - 47
  • [48] Fabrication of diamond microstructures for microelectromechanical systems (MEMS) by a surface micromachining process
    Ramesham, Rajeshuni
    Thin Solid Films, 340 (01): : 1 - 6
  • [49] Fabrication process of PZT piezoelectric cantilever unimorphs using surface micromachining
    Kim, JH
    Wang, L
    Zurn, SM
    Li, L
    Yoon, YS
    Polla, DL
    INTEGRATED FERROELECTRICS, 1997, 15 (1-4) : 325 - 332
  • [50] Fabrication of diamond microstructures for microelectromechanical systems (MEMS) by a surface micromachining process
    Ramesham, R
    THIN SOLID FILMS, 1999, 340 (1-2) : 1 - 6
12345