Research on the generation mechanism of surface and subsurface damage in loose abrasive lapping of RB-SiC ceramics

Reaction-bonded silicon carbide ceramics (RB-SiC) are extensively utilized in aerospace, space optics, and other fields due to their superior physical and chemical properties. Loose abrasive lapping plays a crucial role in the optical manufacturing of large-diameter RB-SiC mirrors. Previous research predominantly focused on grinding processes and overlooked the removal mechanism during lapping and their impact on surface and subsurface damage. In this study, a three-body brittle fracture removal model was established to explore the removal mechanisms of RB-SiC. Additionally, experiments were carried out to investigate the influence of abrasive particle size on the surface and subsurface damage. Experimental results confirm the theoretical model and indicate that for RB-SiC, different particle sizes correspond to distinct removal mechanisms, causing abrupt changes in surface roughness, while the layer under SiC acts as a buffer against the propagation of subsurface damage. These findings help optimize the manufacturing process, improve lapping efficiency, and enhance mirror performance. (c) 2024 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement