High resolution acoustic GHz microscopy

被引:0
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作者
Brand, Sebastian [1 ]
Kögel, Michael [1 ]
Altmann, Frank [1 ]
机构
[1] Fraunhofer Institute for Microstructure of Materials and Systems, IMWS, Center for Applied Microstructure Diagnostics CAM, Halle, Germany
来源
Electronic Device Failure Analysis | 2018年 / 20卷 / 04期
基金
欧盟地平线“2020”;
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页码:4 / 12
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