共 50 条
- [32] Simple methods for site-controlled carbon nanotube growth using radio-frequency plasma-enhanced chemical vapor deposition Applied Physics A, 2004, 79 : 85 - 87
- [33] Simple methods for site-controlled carbon nanotube growth using radio-frequency plasma-enhanced chemical vapor deposition APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (01): : 85 - 87
- [34] Radio frequency power dependence in formation of SiO:CH thin films by plasma-enhanced chemical vapor deposition JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (11): : 7460 - 7464
- [37] New in situ measurement method for nanoparticles formed in a radio frequency plasma-enhanced chemical vapor deposition reactor JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (05): : 1998 - 2000