Modeling of magnetron and glow discharges

被引：0

作者：

Bogaerts, Annemie ^{[1
]}

Kolev, Ivan ^{[1
]}

机构：

[1] Dept. of Chemistry, Univ. of Antwerp, Universiteitsplein 1, 2610 Wilrijk-Antwerp, Belgium

来源：

Vide: Science, Technique et Applications | 2002年 / 2 4卷 / 304期

关键词：

Copper sputtering - Fluid models - Hybrid models - Modeling;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：296 / 307

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