Modeling of magnetron and glow discharges

被引：0
|
作者：
Bogaerts, Annemie [1 ]
Kolev, Ivan [1 ]
机构：
[1] Dept. of Chemistry, Univ. of Antwerp, Universiteitsplein 1, 2610 Wilrijk-Antwerp, Belgium
来源：
Vide: Science, Technique et Applications | 2002年 / 2 4卷 / 304期
关键词：
Copper sputtering - Fluid models - Hybrid models - Modeling;
D O I：
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摘要：
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页码：296 / 307
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