Behavior of plasma parameters under mirror and cusp magnetic fields in DC glow discharge - a numerical study

The plasma parameters in DC glow discharge can easily be controlled by externally applied magnetic field without disturbing internal/built-in process parameters. Though several works have been carried out to study the influence of the magnetic field at different configurations on the plasma parameters, a complete understanding on the behaviour of the plasma discharge under the mirror and cusp fields could not be achieved. Further studies on the same are needed to improve the efficiency of the DC glow discharge system for existing applications and to find the new applications. In this work, a 2D axis-symmetric non-equilibrium plasma model with drift-diffusion approach is developed to study the characteristics of the plasma in DC glow discharge through various plasma parameters under mirror and cusp fields. The effects of current and position of magnetic coils on electric potential, ionization rate, electron temperature and electron number density are predicted and discussed. The distribution of electron number density at various coil currents and positions under both mirror and cusp fields are presented and the operating conditions favorable for applications in surface modification are suggested.