Ion-beam Assisted Magnetron Sputtering Deposition of Titanium Nitride Films

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作者：
He, Huang
Xuegang, Wang
Xiaodong, Zhu
Hua, Chen
Jiawen, He
机构：
[1] Xi'an Jiaotong University, Xi'an 710049, China
[2] Sch. of Mat. Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China
来源：
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering | 2002年 / 31卷 / 03期
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