Epitaxial growth of high-tech perovsky-phased films by off-axis magnetron sputtering

The latest progress in the epitaxial growth of perovsky-phased films by off-axis magnetron sputtering, especially in deposition of the advanced, high-tech film materials, was tentatively reviewed in a thought provoking way. The discussions with specific examples focused on: i) the development trends of the off-axis magnetron sputtering technology; ii) the many advantages of the off-axis magnetron sputtering over other conventional epitaxial growth techniques, for instance, a significant reduction of the impact of re-sputtering originated from secondary electrons and negative ions; and iii) the wide applications of the conventional off-axis magnetron sputtering in epitaxial growth of a variety of advanced film-materials, such as the high temperature superconducting (YBa2Cu3O7-x, YBCO), piezoelectric ceramics (Pb(ZrTi)O3), and ferroelectric ceramics (BiFeO3) materials.