Photoelectrical properties of ITO thin films prepared by magnetron sputtering method on LiNbO3 substrate

被引:0
|
作者
Ke, Xiao-Han [1 ]
Chen, Yun-Lin [1 ]
Zhu, Ya-Bin [1 ]
Fan, Tian-Wei [1 ]
机构
[1] Institute of Applied Micro-Nano Materials, School of Science, Beijing Jiaotong University, Beijing, China
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:368 / 373
相关论文
共 50 条
  • [42] Structural and morphological properties of ITO thin films grown by magnetron sputtering
    Ghorannevis, Z.
    Akbarnejad, E.
    Ghoranneviss, M.
    JOURNAL OF THEORETICAL AND APPLIED PHYSICS, 2015, 9 (04) : 285 - 290
  • [43] Photoelectric properties of ITO thin films deposited by DC magnetron sputtering
    Liu Wei
    Cheng Shuying
    JOURNAL OF SEMICONDUCTORS, 2011, 32 (01)
  • [44] The effects of substrate temperatures on the electrical properties of CaZrO3 thin films prepared by RF magnetron sputtering
    He, Qiao
    Zhang, Yi
    Chen, Xiaoyang
    Wang, Zhi
    Ji, Hang
    Ding, Mingjian
    Xie, Bin
    Yu, Ping
    CURRENT APPLIED PHYSICS, 2020, 20 (04) : 557 - 561
  • [45] Optical properties of LiNbO3 thin films
    Yilmaz, S
    FERROELECTRICS, 2003, 293 : 169 - 176
  • [46] Effects of Substrate Temperature and Vacuum Annealing on Properties of ITO Films Prepared by Radio-Frquency Magnetron Sputtering
    Boonyopakorn, N.
    Sripongpun, N.
    Thanachayanont, C.
    Dangtip, S.
    CHINESE PHYSICS LETTERS, 2010, 27 (10)
  • [47] INFLUENCE OF SUBSTRATE MATERIALS ON THE STRUCTURAL PROPERTIES OF ZNO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING
    Ahmad, S.
    Sin, N. D. Md
    Roslan, Liyana
    Pahroraji, Hazriel Faizal
    Alias, S. K.
    Sulaiman, S. A.
    Hashim, Siti Mardini
    Berhan, M. N.
    Rusop, M.
    JURNAL TEKNOLOGI, 2015, 76 (09): : 53 - 56
  • [48] Effects of heat treatment on properties of ITO films prepared by rf magnetron sputtering
    Hu, YL
    Diao, XG
    Wang, C
    Hao, WC
    Wang, TM
    VACUUM, 2004, 75 (02) : 183 - 188
  • [49] Properties of zirconia thin films prepared by reactive magnetron sputtering
    Hembram, K. P. S. S.
    Mohan Rao, G.
    MATERIALS LETTERS, 2007, 61 (02) : 502 - 505
  • [50] Effect of Sputtering Power on the Properties of TaN Thin Films Prepared by the Magnetron Sputtering
    Lu, Qinxin
    Zhang, Xiuqing
    Gu, Liangnan
    Xue, Ninghua
    2016 3RD INTERNATIONAL CONFERENCE ON SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING (SMNE 2016), 2016, : 67 - 70