Advanced layout fragmentation and simulation schemes for model based OPCC

被引：0
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作者：
Mentor Graphics Corp., 8005 S.W. Boeckman Rd, Wilsonville, OR 97070-7777 [1 ]
机构：
来源：
SPIE | 1600年 / 1159-1168卷 / 2005期
关键词：
Theoretical; (THR); -; Experimental; (EXP);
D O I：
March 1, 2005 - March 4, 2005
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