Laser interference photolithography for fabricating periodic patterns in large area

被引：0
|
作者：
Zhang, Jin [1 ]
Feng, Bo-Ru [1 ]
Guo, Yong-Kang [1 ]
Jiang, Shi-Lei [1 ]
Zong, De-Rong [1 ]
Du, Jing-Lei [1 ]
Zeng, Yang-Su [1 ]
Gao, Fu-Hua [1 ]
机构：
[1] Dept. of Phys., Sichuan Univ., Chengdu 610064, China
来源：
Guangdian Gongcheng/Opto-Electronic Engineering | 2001年 / 28卷 / 06期
关键词：
Interference photolithography - Large area - Laser interference - Micro electronic devices - Periodic patterns;
D O I：
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学科分类号：
摘要：
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页码：20 / 23
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