Ca0.15Zr0.85O1.85Thin Film for Application to MIM Capacitor on Organic Substrate

被引：1
|
作者：
Kim, Jin-Seong [1 ]
Han, Jae-Min [1 ]
Joung, Mi-Ri [1 ]
Kweon, Sang-Hyo [1 ]
Kang, Chong-Yun [2 ,3 ]
Paik, Jong-Hoo [4 ]
Jeong, Young-Hun [4 ]
Nahm, Sahn [1 ,2 ]
机构：
[1] Department of Materials Science and Engineering, Korea University, 1-5 Ga, Anam-Dong, Seongbuk-Gu, Seoul,136-701, Korea, Republic of
[2] Information Technology-Nano Science, KU-KIST Graduate School of Converging Science and Technology, 1-5 Ga, Anam-Dong, Seongbuk-Gu, Seoul,136-713, Korea, Republic of
[3] Thin Film Materials Research Center, Korea Institute of Science and Technology, 39-1, Hawolgok-Dong, Seongbuk-Gu, Seoul,136-791, Korea, Republic of
[4] Electronic Components Center, Korea Institute of Ceramic Engineering and Technology, Seoul,153-081, Korea, Republic of
来源：
Energy Harvesting and Systems | 2014年 / 1卷 / 03期
关键词：
D O I：
10.1515/ehs-2014-0010
中图分类号：
学科分类号：
摘要：
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页码：243 / 250
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