Numerical simulation for ULSI manufacturing process

被引：0
|
作者：
Hiyama, Hirokuni
Wang, Xinming
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来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2008年 / 74卷 / 05期
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D O I：
10.2493/jjspe.74.435
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页码：435 / 440
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