The effect of water uptake on the mechanical properties of low-k organosilicate glass

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作者：
Guo, X. [1 ]
Jakes, J.E. [2 ]
Nichols, M.T. [1 ]
Banna, S. [3 ]
Nishi, Y. [4 ]
Shohet, J.L. [1 ]
机构：
[1] Plasma Processing Technology Laboratory, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, WI 53706, United States
[2] Forest Biopolymer Science and Engineering, USDA Forest Service Forest Products Laboratory, Madison, WI 53726, United States
[3] Applied Materials, Sunnyvale, CA 94085, United States
[4] Stanford University, Stanford, CA 94305, United States
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Journal of Applied Physics | 2013年 / 114卷 / 08期
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