Design of a monolithic resonant force sensor for microforce measurements

This article deals with the development of an uniaxial resonant force sensor dedicated for the measurement of static forces in the range of the micronewtons. The 20 mm x 20 mm x 1 mm monolithic supporting mechanism is synthesized using a numerical multi-criteria optimization method which can maximize geometrical and mechanical advantages. Some piezoelectric transducers are optimally placed on the structure in order to locally produce excitations in the mechanical structure and to measure the mechanical external stress. Calibration and characterization have shown that the reached resolution is about 0.4 nN. © 2010 Lavoisier, Paris.