Preperation of potassium niobate thin films by the electron-beam deposition

被引：0
|
作者：
Okano, Hiroshi [1 ]
Okada, Mitsutaka [1 ]
Miyawaki, Takuma [1 ]
Nakamura, Shigeaki [1 ]
Hasegawa, Koji [2 ]
机构：
[1] Takamatsu National College of Technology, 355 Chokushi, Takamatsu, Kagawa, 761-8058, Japan
[2] Department of Electrical and Electronic Engineering, Muroran Institute of Technology, 27-1 Mizumoto-cho, Muroran, 050-8585, Japan
来源：
Shinku/Journal of the Vacuum Society of Japan | 2003年 / 46卷 / 03期
关键词：
D O I：
10.3131/jvsj.46.269
中图分类号：
学科分类号：
摘要：
7
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页码：269 / 271
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