Zirconium Dioxide Thin Films Characterized by XPS

被引：84
|
作者：
Barreca, Davide [1 ]
Battiston, Giovanni A. [2 ,2 ]
Tondello, Eugenio [3 ]
Zanella, Pierino [4 ]
机构：
[1] Dipartimento C.I.M.A., CSSRCC-CNR, Università  di Padova, Via Loredan, 4, Padova,35131, Italy
[2] I.C.T.I.M.A., Corso Stati Uniti, 4, Padova,35127, Italy
[3] Dipartimento C.I.M.A., CSSRCC-CNR, Università  di Padova, Via Loredan, 4, Padova,35131, Italy
[4] I.C.T.I.M.A., Corso Stati Uniti, 4, Padova,35127, Italy
来源：
Surface Science Spectra | 2000年 / 7卷 / 04期
关键词：
Photons - Photoelectrons - Film preparation - X ray photoelectron spectroscopy - Binding energy - Zirconia;
D O I：
10.1116/1.1375573
中图分类号：
学科分类号：
摘要：
In this work we use x-ray photoelectron spectroscopy (XPS) to analyze the principal core levels of a ZrO2 thin film deposited on glass using Zr(OPri)3(dpm) (OPri=isopropoxy; hdpm=2,2,6,6-tetramethyl-3,5-heptanedione) as precursor. Besides the general survey, charge corrected binding energies for the Zr 3d5/2, Zr 3d3/2, O 1s, and C 1s photoelectrons are reported. Deconvolution of the O 1s signal reveals the presence of -OH groups and adsorbed water, whose presence can be related to the air exposure of the film between its preparation and XPS analysis. © 2000 American Vacuum Society.
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页码：303 / 309
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