A design-oriented experimental module for teaching micro- and nanotechnologies to mechanical engineering students

被引:0
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作者
Xue, Wei [1 ]
机构
[1] Mechanical Engineering, School of Engineering and Computer Science, Washington State University, 14204 NE Salmon Creek Avenue, Vancouver, WA 98686, United States
关键词
MEMS;
D O I
10.7227/IJMEE.40.1.5
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页码:11 / 23
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