Microstructure and Tribological Properties of CrN Films Deposited by Direct Current Magnetron Sputtering

被引：0
|
作者：
直流溅射沉积CrN薄膜组织结构与摩擦性能分析
机构：
[1] Ren, Xingrun
[2] Zhang, Qinying
[3] Huang, Zhu
[4] Su, Wei
[5] 2,Yang, Jiangao
[6] 1,2,Chen, Hao
来源：
Chen, Hao (chenhao_168168@126.com) | 2018年 / Science Press卷 / 47期
基金：
中国国家自然科学基金;
关键词：
Nitrogen - Deposition rates - Friction - Scanning electron microscopy - Magnetron sputtering - Microhardness - Surface roughness - Tribology - Wear resistance - Chromium alloys - Wear of materials;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
下载
收藏
相关论文
共 50 条
  • [41] Influence of annealing temperature on the properties of ZnO:Zr films deposited by direct current magnetron sputtering
    Zhang, Huafu
    Liu, Hanfa
    Feng, Liu
    VACUUM, 2010, 84 (06) : 833 - 836
  • [42] Effects of sputtering pressure on microstructure and mechanical properties of ZrN films deposited by magnetron sputtering
    Lin Shaochen
    Zhang Jian
    Zhu Ruihua
    Fu Shangchao
    Yun Daqin
    MATERIALS RESEARCH BULLETIN, 2018, 105 : 231 - 236
  • [43] The Effects of Magnetic Field on the Deposited Performance of CrN Films by Magnetron Sputtering
    Jean, Ming-Der
    Chou, Ming-Tsong
    ADVANCED MATERIALS AND PROCESSES, PTS 1-3, 2011, 311-313 : 1340 - 1347
  • [44] Research on CrN-based Ternary Films Deposited by magnetron sputtering
    Di, Yuelan
    Cai, Zhihai
    Zhang, Ping
    Shen, Wei
    ADVANCED MATERIALS AND PROCESSES II, PTS 1-3, 2012, 557-559 : 1650 - 1653
  • [45] CrN films deposited by ion source-assisted magnetron sputtering
    Liu Chuansheng
    Tian Canxin
    Li Ming
    He Jun
    Yang HuiJuan
    Yang Bing
    Wang Hong Jun
    Fu Dejun
    NUCLEAR SCIENCE AND TECHNIQUES, 2010, 21 (05) : 289 - 293
  • [46] Comparison of microstructures and magnetic properties in FePt alloy films deposited by direct current magnetron sputtering and high power impulse magnetron sputtering
    Yang, Wen-Sheng
    Sun, Ta-Huang
    Chen, Sheng-Chi
    Jen, Shien-Uang
    Guo, Han-Jie
    Liao, Ming-Han
    Chen, Jiann-Ruey
    JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 803 : 341 - 347
  • [47] CrN films deposited by ion source-assisted magnetron sputtering
    LIU Chuansheng1 TIAN Canxin1 LI Ming1 HE Jun1 YANG HuiJuan1 YANG Bing2 WANG Hong Jun1 FU Dejun 1
    Nuclear Science and Techniques, 2010, 21 (05) : 289 - 293
  • [48] Properties of CrN thin films deposited in plasma-activated ABS by reactive magnetron sputtering
    Pedrosa, Paulo
    Rodrigues, Marco S.
    Neto, Miguel A.
    Oliveira, Filipe J.
    Silva, Rui F.
    Borges, Joel
    Amaral, Margarida
    Ferreira, Antonio
    Godinho, Luis H.
    Carvalho, Sandra
    Vaz, Filipe
    SURFACE & COATINGS TECHNOLOGY, 2018, 349 : 858 - 866
  • [49] Microstructure, mechanical and tribological properties of TaCN composite films by reactive magnetron sputtering
    Yu, Dian
    Yu, Lihua
    Jia, Pei
    Ju, Hongbo
    Luo, Huang
    Xu, Junhua
    Koyama, Shinji
    CERAMICS INTERNATIONAL, 2020, 46 (13) : 20683 - 20694
  • [50] Tribological behavior of thick CrN coatings deposited by modulated pulsed power magnetron sputtering
    Lin, Jianliang
    Sproul, William D.
    Moore, John J.
    SURFACE & COATINGS TECHNOLOGY, 2012, 206 (8-9): : 2474 - 2483
12345