Microstructure and Tribological Properties of CrN Films Deposited by Direct Current Magnetron Sputtering

被引：0
|
作者：
直流溅射沉积CrN薄膜组织结构与摩擦性能分析
机构：
[1] Ren, Xingrun
[2] Zhang, Qinying
[3] Huang, Zhu
[4] Su, Wei
[5] 2,Yang, Jiangao
[6] 1,2,Chen, Hao
来源：
Chen, Hao (chenhao_168168@126.com) | 2018年 / Science Press卷 / 47期
基金：
中国国家自然科学基金;
关键词：
Nitrogen - Deposition rates - Friction - Scanning electron microscopy - Magnetron sputtering - Microhardness - Surface roughness - Tribology - Wear resistance - Chromium alloys - Wear of materials;
D O I：
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摘要：
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