X-ray analysis of stress distribution in semiconductor films bonded to a piezoelectric substrate

被引：0
|
作者：
Kaneshiro, Chinami [1 ]
Nakajima, Tsutomu [1 ]
Miyadai, Ken-Ichiro [1 ]
Aoki, Yusuke [1 ]
Koh, Keishin [1 ]
Hohkawa, Kohji [1 ]
机构：
[1] Dept. of Elec. and Elec. Engineering, Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi, Kanagawa 243-0292, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 6 A期
关键词：
D O I：
10.1143/jjap.41.4000
中图分类号：
学科分类号：
摘要：
10
引用
收藏
页码：4000 / 4006
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