Finite element analysis and measurement of a 20-element bimorph deformable mirror

被引：0
|
作者：
Ning, Yu [1 ,2 ]
Zhou, Hong [2 ,3 ]
Guan, Chunlin [2 ]
Rao, Changhui [2 ]
Jiang, Wenhan [2 ]
机构：
[1] College of Photon-Electron Science and Engineering, National University of Defense Technology, Changsha 410073, China
[2] Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
[3] Graduate School, Chinese Academy of Sciences, Beijing 100039, China
来源：
Guangxue Xuebao/Acta Optica Sinica | 2008年 / 28卷 / 09期
关键词：
Deformation - Mirrors - Method of moments - Adaptive optics;
D O I：
10.3788/AOS20082809.1638
中图分类号：
学科分类号：
摘要：
Influence function is a key parameter to evaluate the capability of bimorph deformable mirrors in correcting aberrations. Influence functions of a 20-element bimorph deformable mirror are measured by Veeco interferometer and simulated by a finite element model. Compared with the measured data, simulated results come out a little smaller. But they are consistent in both shape and the location of peak. And the finite element model can predict the correction on 1-35 Zernike aberrations of the 20-element bimorph deformable mirror correctly, with errors smaller than 0.1. It is feasible to improve the bimorph deformable mirror by optimization of its finite element model.
引用
收藏
页码：1638 / 1642
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