Fabrication of short-channel thin-film transistor using conventional photolithography

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作者：
LG Display, Process Development Team 1, 1007 Deogeun-ri, Wollong-myeon, Paju, Gyeonggi-do, 413-811, Korea, Republic of [1 ]
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来源：
Jpn. J. Appl. Phys. | / 3 PART 3卷
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Compendex;
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03B020
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摘要：
Thin film transistors
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