Effect of grid bias on deposition of nanocrystalline diamond films

被引：0
|
作者：
Xu, Feng [1 ]
Zuo, Dunwen [1 ]
Lu, Wenzhuang [1 ]
Wang, Min [1 ]
机构：
[1] College of Mechanical and Electrical Engineering, NUAA, 29 Yudao Street, Nanjing 210016, China
来源：
Transactions of Nanjing University of Aeronautics and Astronautics | 2007年 / 24卷 / 04期
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学科分类号：
摘要：
20
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页码：317 / 322
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