Effect of film thickness on structure and optoelectrical properties of Zr, Al Co-doped ZnO transparent conducting thin films

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作者
Yuan, Yu-Zhen [1 ]
Wang, Hui [1 ,2 ]
Zhang, Hua-Fu [1 ]
Liu, Han-Fa [1 ]
Liu, Yun-Yan [1 ]
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[1] School of Science, Shandong University of Technology, Zibo 255049, China
[2] School of Materials Science and Engineering, Shandong University of Technology, Zibo 255049, China
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页码:169 / 173
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