机构:
IBM Corp, Hopewell Jct, NY 12533 USAIBM Corp, Hopewell Jct, NY 12533 USA
Patterson, Oliver D.
Werbaneth, Paul
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EV Grp, St Florian Am Inn, Austria
Tegal Corp, Plasma Etch, Petaluma, CA USA
Tegal Corp, Silicon DRIE, Petaluma, CA USA
Tegal Corp, PVD Prod, Petaluma, CA USA
Tegal Japan Inc, Kawasaki, Kanagawa, Japan
Hitachi High Technol, Ibaraki, Osaka, JapanIBM Corp, Hopewell Jct, NY 12533 USA
Werbaneth, Paul
Eisenbraun, Eric
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SUNY Albany, Coll Nanoscale Sci & Technol, Albany, NY 12203 USAIBM Corp, Hopewell Jct, NY 12533 USA