共 50 条
- [33] Near-field acoustic levitation of 8'' Si wafer and glass substrate using flexural vibration INSTITUTE OF ENVIRONMENTAL SCIENCES 1996 PROCEEDINGS - CONTAMINATION CONTROL: SYMPOSIUM ON MINIENVIRONMENTS/42ND ANNUAL TECHNICAL MEETING - EXPANDING OUR TECHNICAL EXCELLENCE THROUGH EDUCATION, 1996, : 500 - 505
- [36] Levitating Force and Stability Analysis of Near-field Acoustic Levitation using Flexural Vibrations of the Plate Acoustical Physics, 2021, 67 : 120 - 127
- [39] Hybrid near-field acoustic holography JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 2004, 115 (01): : 207 - 217
- [40] NEAR-FIELD SCANNING ACOUSTIC MICROSCOPE IEEE 1989 ULTRASONICS SYMPOSIUM : PROCEEDINGS, VOLS 1 AND 2, 1989, : 805 - 807