Generation and wavelength control of resonant luminescence from silicon photonic crystal microcavities with Ge dots

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作者：
Advanced Research Laboratories, Musashi Institute of Technolgy, 8-15-1 Todoroki, Setagaya-ku, Tokyo 158-0082, Japan [1 ]
不详 [2 ]
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来源：
Jpn. J. Appl. Phys. | / 2卷
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Compilation and indexing terms; Copyright 2024 Elsevier Inc;
D O I：
022102
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摘要：
Electron beam lithography - Luminescence - Photonic devices - Microcavities - Nanocrystals - Photonic crystals - Semiconductor quantum dots - Silicon on insulator technology - Reactive ion etching - Silicon photonics - Light
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