Substrate temperature-dependant properties of HMGZO thin films deposited by DC magnetron sputtering

被引：0
|
作者：
Liu, Jie-Ming [1 ]
Chen, Xin-Liang [1 ]
Tian, Cong-Sheng [1 ]
Liang, Jun-Hui [1 ]
Zhang, De-Kun [1 ]
Zhao, Ying [1 ]
Zhang, Xiao-Dan [1 ]
机构：
[1] Tianjin Key Laboratory on Photoelectronic Thin Film Devices and Technology, Institute of Photo-electronic Thin Film Devices and Technology, Nankai University, Tianjin , China
来源：
Guangdianzi Jiguang/Journal of Optoelectronics Laser | 2014年 / 25卷 / 11期
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页码：2114 / 2122
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